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Research Article

Academia Journal of Scientific Research 6(5): 180-189, May 2018
DOI: 10.15413/ajsr.2018.0104
ISSN: 2315-7712
©2018 Academia Publishing 




Influence of annealing temperature on the performance and stability of on-chip hydrothermally grown ZnO nanorod gas sensor toward NO2

Accepted 24th February, 2018

Mingzhi Jiao1, Nguyen Viet Chien2, Nguyen Van Duy2, Nguyen Duc Hoa2, Nguyen Van Hieu2, Klas Hjort1 and Hugo Nguyen1*

1Uppsala University, Department of Engineering Sciences, Division of Microsystem Technology, Ångström Laboratory, P.O Box 534, SE-75121 Uppsala, Sweden.
2International Training Institute for Materials Science, Hanoi University of Science and Technology, No. 1 Dai Co Viet Str. Hanoi, Vietnam.

Nanorod-based gas sensors synthesized at low temperature should generally be stabilized by annealing before usage. However, the influence of annealing on the sensing performance and stability of these nanorods is rarely reported. In this study, we first fabricated gas sensors based on ZnO nanorods grown on-chip on glass substrate using hydrothermal method. Subsequently, these sensors were annealed at either 400, 500 or 600°C in air for 4 h. The gas-sensing performance of the ZnO nanorods toward NO2 was tested before and after annealing. The sensitivity of the gas sensors to NO2 decreased, but the stability increased with increase in annealing temperature. Photoluminescence spectroscopy and X-ray diffraction were used to investigate the material structure of ZnO nanorods. Results revealed that the oxygen-atom-related defects in the ZnO lattice in the region close to the surface influenced by annealing process were the most significant factors on the sensing properties and stability of ZnO nanorods.

Key words: Annealing, defects in nanorods, gas sensor, hydrothermal, zinc oxide.

This is an open access article published under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Cite this article as:
Jiao M, Chien NV, Duy NV, Hoa ND, Hieu NV, Hjort K, Nguyen H (2018). Influence of annealing temperature on the performance and stability of on-chip hydrothermally grown ZnO nanorod gas sensor toward NO2. Acad. J. Sci. Res. 6(5): 180-189.

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